Microsensors and MEMS


This course presents an overview of various thin film and thick film processing, microfabrication and
micromachining techniques utilized for producing microsensors, microelectromechanical systems
(MEMS) and microactuators. Device design for piezoresistive, piezoelectric, electromagnetic, thermal,
optical, and chemical sensors and actuators will be discussed.


Department of Electronics
Mackenzie Building 5170
1125 Colonel By Drive,
Ottawa, ON K1S 5B6

Tel: 613-520-5755 Fax: 613-520-5708


Contact Us

Search Carleton