Microsensors and MEMS

ELEC 5707


Physical design of microelectromechanical systems (MEMS) and microfabricated sensors and actuators. An overview of thin and thick film processes and micromachining techniques will provide fabrication background. Device design including piezoresistive, piezoelectric, electromagnetic, thermal, optical, and chemical sensors and actuators.

Department of Electronics
Mackenzie Building 5170
1125 Colonel By Drive,
Ottawa, ON K1S 5B6

Tel: 613-520-5755 Fax: 613-520-5708


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